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Hitachi Plant Technologies, Ltd.

Hitachi

Image: Industrial clean room

We provide various clean rooms for electronics industries such as semiconductors, display panels, and nanotechnology, based on our unique total clean technology.

Low-cost clean rooms

Air stagnation reduction system using half-closed panel
We aim for low cost and energy conservation, while maintaining the necessary cleanliness of the area.
Local cleanliness technology (mini-environment)
Local cleanliness technology minimizes investment and reduces running costs by maintaining high cleanliness only in the local space around the products.
Clean rooms with no return duct
It is possible to expand the production area without changing the area of the current clean room, so production efficiency can be improved.

Cleanliness technology

Air flow control technology
The air flow in the clean room is appropriately controlled by air flow simulations or air flow visualization tests.
Cleaning diagnosis
We carry out cleaning diagnosis using advanced measurement and analysis instruments.
Control of chemical contamination
The appropriate environment is maintained within the clean room by minimizing chemical contaminants using various measurement and analysis technologies.

Clean room renovation

We actively renovate clean rooms to improve the function of existing facilities in a short time for a low cost, while operating the facilities.