Industrial Clean Rooms : Outline

What is a clean room?

A clean room is a room whose temperature, humidity, pressure and the number of particle are controlled to meet a certain requirements.

448 thousand particles per minute are generated from a man sitting still in the working wear.

In the semiconductor manufacturing, the clean room with the cleanliness class 1 to 3 specified by JIS, showing more than 99.9995% of 0.1μm particles per m3 are eliminated, would be required.
And class 6 to 7 show the cleanliness above the sea and class 8 to 9 show on the crowded street.A single fine particle on a semiconductor chip could lead to defective product and decrease in yield.