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Tohoku University
- Clean room (class 2/600 m2)
- Thermal clean
- Energy saving clean draft chamber
- Ultra-pure gas supply system
- Cylinder cabinet
- Ultra-pure water system
- Exhaust gas treatment equipment
- Waste fluid treatment equipment
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Hiroshima University
- Clean room (class 5 or 6/500 m2)
- Vibration isolating base
- Ultra-pure gas supply system
- Cylinder cabinet
- Ultra-pure water system
- Exhaust gas treatment equipment
- Waste fluid treatment equipment