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In the clean room in Clean Techno Center, various experiments can be performed at any cleanliness, and visualization test of unsteady airflow is performed with smoke.
Correlation between results of measurement and visualization of airflow and dust flow
Results of measurement of airflow and dust flow
Results of visualization
Airflow simulation system
Examination of outlet
Without diffusion face
Punching face
Disturbance of airflow during equipment maintenance
