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Hitachi Plant Technologies, Ltd.

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Outline

A clean room in which the cleanliness is improved by circulating some of the air in the room to the ceiling using the pressure difference between the ceiling chamber and the clean room

Schematic drawingimage

Example of installation (plan view)images

Half-closed panelphoto

Features

  • Prevention of stagnant air in the clean room
  • Reduction of the number of times of effective ventilation
  • Reduction of the number of FFU installed

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