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Hitachi Plant Technologies, Ltd.

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Vacuum Assembling System (VAS series)

VAS-1250seriesphoto

Establishes optimum process for ever-progressing liquid chrystal display production line.

Featuring newly-developped, leading-edge adsorption system, an ideal ODF vacuum assembly system for the cost-competitive large-sized LCD panels market.

Features / Configuration

The leading-edge adsorption system.

-Combining electrostatic chucking and vacuum chucking, the new adsorption system realizes stable positioning and vacuum assembly of large-sized substrates.

Meets the latest process requirement.

-System meets the latest process requirement, such as high viscosity liquid crystal, which is necessary for manufacturing wide viewing angle, large screen, high-speed response LCD panels, and large-sized, narrow-gapped cell assembly.

High throughput.

-In the past, liquid crystal injection took 20 hours or more for 20-inch LCD panel.
→By One Drop Fill (ODF) technology, it greatly shortened to only less than four munites!

Dramatically reduced liquid crystal material usage.

-Effective usage rate of liquid crystal material is improved from 50% to90% by adopting highly accurate liquid crystal injection system.

Standard Specifications

ModelVAS500VAS900VAS1250
Substrate size360 x 460~400 x 500(mm)680 x 880~730 x 920(mm)1000 x 1200~1100 x 1300(mm)
Substrate adsorption method Electrostatic adsorption + Vacuum adsorption and others
Positioning Binary + Multivalued image processing Reflection + Ttransmitted light Binary + Multivalued image processing Transmitted Illumination
Chamber structure Binary + Multivalued image processing Transmitted Illumination Open by gate valve (can be separated in case of maintenance)
Positioning accuracy ±1µmm
Option Vacuum pressure control function Partial substrate availability, Vacuum pressure control, CIM, Offset feedback function
  • *This product is an export-controled item, which is restricted to deliver to certain countries and areas. For details,please contact us before shipping.

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